Ion Guns: Model 1403 TOF/SIMS 离子枪

Ion Guns:  Model 1403 TOF/SIMS 离子枪

 

Design Features

  • High brightness electron impact source for maximum bulk material removal
  • Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300
  • Adjustable spot size from 20 µm to > 1 mm for spatially defined sputtering
  • Continuously variable beam energy up to 5keV
  • Neutral species suppression using beam bending optics
  • Beam blanking capability for TOF SIMS
  • Integral beam current monitoring capability
  • Replaceable beam trimming aperture with typical life-time of > 500 hours
  • Dual filaments provide operational backup with typical filament life-time > 500 hours
  • Internal source pressure sensor permits monitoring of ion source pressure
  • All UHV compatible and etch resistant materials used in fabrication
  • Pre-objective lens deflection for reduced spot size
  • Differential pumping to minimize main chamber gas loading
  • Operates over the range of inert gas species

 

Engineering Specifications

 Working Distance 35 mm
 Neutral Species Suppression 3° Electrostatic bend optics
 Beam Energy ≤ 5 keV continuously variable
 Raster Size 4 x 4 mm (minimum)
 Mounting Flange 70 mm (4.5 in) O.D. C.F.
 Differential Pumping 70 mm (2.75 in) O.D. C.F.
 Supply Gas Inlet 34 mm (1.33 in) O.D. C.F.
 Source Gases He, Ne, Ar, Kr, Xe
 Bake-out Temperature 150° C maximum